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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Optics Lettersarrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Optics Letters
Article . 2022 . Peer-reviewed
License: https://doi.org/10.1364/OA_License_v2#VOR
Data sources: Crossref
Optics Letters
Article . 2022
Data sources: Europe PubMed Central
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Dynamic spectroscopic imaging ellipsometry

descriptionPublicationkeyboard_double_arrow_right Article 22 Feb 2022 English Publisher:Optica Publishing GroupJournal:Optics Letters, volume 47, page 1,129 (issn: 0146-9592, eissn: 1539-4794, Copyright policy )
Authors: Daesuk Kim; Vamara Dembele; Sukhyun Choi; Gukhyeon Hwang; Saeid Kheiryzadehkhanghah; Chulmin Joo; Robert Magnusson;

doi: 10.1364/ol.451064

pmid: 35230308

Dynamic spectroscopic imaging ellipsometry

Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

Related Organizations
Keywords

Refractometry, Spectrum Analysis

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
9
Top 10%
Top 10%
Top 10%
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