
doi: 10.1364/oe.502252
pmid: 38087612
Waveguiding across the visible spectrum in an unmodified bulk CMOS chip is reported. The chip is fabricated in a standard CMOS process, and a simple wet etch removes metal in predetermined locations to expose glass rib waveguides. A modified Euler bend is introduced to improve bend radii by nearly an order of magnitude in the rib waveguides, and upper-bound losses are measured at visible wavelengths. These losses range from 6.2 dB/cm at 450 nm to 3.2 dB/cm at 650 nm and represent the lowest losses reported at visible wavelengths in unmodified bulk CMOS.
Atomic and Molecular Physics, and Optics, 530, 620
Atomic and Molecular Physics, and Optics, 530, 620
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