We experimentally analyzed the internal reflection and loss of each component in a Si photonics frequency-modulated continuous-wave light detection and ranging (FMCW LiDAR) device using optical frequency domain reflectometry (OFDR) with a spatial resolution of better than 2.5 µm. Sweeping the incident laser wavelength by 120 nm, the reflections and losses of wire waveguides, widened waveguides, and optical switches on the chip were individually revealed. The slow-light grating (SLG) beam scanner, which has a limited working wavelength range, was evaluated with a spatial resolution of >10 µm by narrowing the wavelength sweep range. Consequently, a strong reflection was observed at the transition between the wire waveguide and the SLG, which can be a noise source in the FMCW LiDAR. Additionally, this study showed that the OFDR can be an important analysis tool for Si photonics integrated circuits. To our knowledge, this is the first demonstration, showing that the OFDR can be an important analysis tool for Si photonic integrated circuits.