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Optics Express
Article . 2023 . Peer-reviewed
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Optics Express
Article . 2023
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Spectroscopic ellipsometry of very rough surfaces

Authors: Subiao Bian; Oriol Arteaga;

Spectroscopic ellipsometry of very rough surfaces

Abstract

This work expands the use of spectroscopic ellipsometry to surfaces with roughness that is similar to or larger than the wavelength of the incident light. By using a custom-built spectroscopic ellipsometer and varying the angle of incidence, we were able to differentiate between the diffusely scattered and specularly reflected components. Our findings demonstrate that measuring the diffuse component at specular angles is highly beneficial for ellipsometry analysis, as its response is equivalent to that of a smooth material. This allows for accurate determination of the optical constants in materials with extremely rough surfaces. Our results have the potential to broaden the scope and utility of the spectroscopic ellipsometry technique.

Country
Spain
Keywords

Ellipsometry, Optical properties, Propietats òptiques, El·lipsometria

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    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Top 10%
Average
Top 10%
Green
gold