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Optics Express
Article . 2020 . Peer-reviewed
Data sources: Crossref
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Optics Express
Article
License: CC BY
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High-resolution microscopy through optically opaque media using ultrafast photoacoustics

Authors: Alessandro Antoncecchi; Hao Zhang; Stephen Edward; Vanessa Verrina; Paul C. M. Planken; Stefan Witte;

High-resolution microscopy through optically opaque media using ultrafast photoacoustics

Abstract

We present a high-resolution microscope capable of imaging buried structures through optically opaque materials with micrometer transverse resolution and a nanometer-scale depth sensitivity. The ability to image through such materials is made possible by the use of laser ultrasonic techniques, where an ultrafast laser pulse launches acoustic waves inside an opaque layer and subsequent acoustic echoes from buried interfaces are detected optically by a time-delayed probe pulse. We show that the high frequency of the generated ultrasound waves enables imaging with a transverse resolution only limited by the optical detection system. We present the imaging system and signal analysis and demonstrate its imaging capability on complex microstructured objects through 200 nm thick metal layers and gratings through 500 nm thickness. Furthermore, we characterize the obtained imaging performance, achieving a diffraction-limited transverse resolution of 1.2 μm and a depth sensitivity better than 10 nm.

Countries
Italy, Netherlands
Keywords

acoustic waves; acoustic phenomena; photoacoustic effects; metrology ultrasound, 530, 620

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    influence
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    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
10
Top 10%
Top 10%
Top 10%
Green
gold