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Optics Express
Article . 2006 . Peer-reviewed
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Optics Express
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Optics Express
Article . 2012
https://dx.doi.org/10.25916/su...
Other literature type . 2024
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https://dx.doi.org/10.25916/su...
Other literature type . 2024
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Femtosecond fabricated photomasks for fabrication of microfluidic devices

Authors: Day, Daniel; Gu, Min;

Femtosecond fabricated photomasks for fabrication of microfluidic devices

Abstract

This paper describes the direct write laser fabrication of a photolithography mask for prototyping of microfluidic devices in polydimethylsiloxane. An amplified femtosecond pulse laser is used to selectively remove the aluminium metal layer from the poly(methyl methacrylate) photomask substrate. The use of a femtosecond pulse laser to selectively etch a metal layer has several advantages over other conventional methods for binary photomask fabrication, namely rapid prototyping of microfluidic devices using soft lightography. Control of the energy density and defocus position of the focusing objective lens results in the etching of features with widths ranging from 2 µm to 35 µm when using an objective lens with a numerical aperture of 0.25.

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Australia
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
9
Average
Top 10%
Average
gold