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Advances in Sciences and Technology
Article . 2026 . Peer-reviewed
License: CC BY
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Thermal desorption spectroscopy studies of xenon implanted into germanium

Authors: Marcin Turek; Andrzej Droździel; Krzysztof Pyszniak;

Thermal desorption spectroscopy studies of xenon implanted into germanium

Abstract

The thermal desorption of Xe implanted into the Ge samples are considered in the paper. The ions of that heavy inert gas are implanted into the target with the energies 100 keV and 150 keV and fluence of 2×1016 cm-2. Abrupt emissions of Xe were registered using thermal desorption spectrometry (TDS) in the temperature range 800 K-840 K. A single TDS peak (width of several K up to ~25 K, depending on heating profile ramp rate) is most probably a result of gas release from pressurized Xe filled cavities formed by vacancy coalescence. The estimated values of the adsorption activation energy values are: 3.15 eV and 2.1 eV for the implantation energies 100 keV and 150 keV, respectively. These values are comparable to those obtained for Ar and Kr implanted into Ge as well as heavy inert gases in silicon samples.

Country
Poland
Keywords

germanium, thermal desorption spectroscopy, ion implantation

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
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