Abstract The process of gas adsorption is controlled only by temperature and pressure. When these parameters are fixed, the adsorption capability and selectivity cannot be changed. The microwave has characteristics to excite particular components such as water without destroying it. Thus, using microwaves, we have studied the adsorption of CFCs on zeolite from gas mixtures containing water which interferes with the adsoption. It was found that CFCs adsorption improved outstandingly when adsorption was conducted under microwave irradiation.