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Computation Lithography: Virtual Reality and Virtual Virtuality

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type , Conference object 06 Mar 2009 China (People's Republic of) Publisher:The Electrochemical SocietyJournal:ECS Transactions, volume 18, pages 351-356 (issn: 1938-5862, eissn: 1938-6737, Copyright policy )
Authors: Wong, AKK; Lam, EY;

doi: 10.1149/1.3096471 , 10.1364/oe.17.012259

pmid: 19654627

handle: 10722/62090 , 10722/158630

Computation Lithography: Virtual Reality and Virtual Virtuality

Abstract

Computation lithography is enabled by a combination of physical understanding, mathematical abstraction, and implementation simplification. An application in the virtual world of computation lithography can be a virtual reality or a virtual virtuality depending on its engineering sensible-ness and technical feasibility.

Country
China (People's Republic of)
Related Organizations
Keywords

Photolithography, Optics and Photonics, Models, Statistical, Physics, Physics - methods, Equipment Design, Statistical, Models, Theoretical, Computational imaging, Theoretical, Models, Microlithography, Computer Simulation, Algorithms

  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 42
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    		 Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    		 Top 10%
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
42
Top 10%
Top 10%
Top 10%
Green
gold