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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao ECS Transactionsarrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
ECS Transactions
Article . 2006 . Peer-reviewed
License: IOP Copyright Policies
Data sources: Crossref
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
ECS Meeting Abstracts
Article . 2006 . Peer-reviewed
License: IOP Copyright Policies
Data sources: Crossref
https://dx.doi.org/10.1149/1.2...
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Development of a Selective Tantalum Carbide Etchant

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 30 Jun 2006Publisher:The Electrochemical SocietyJournal:ECS Transactions, volume 3, pages 375-385 (issn: 1938-5862, eissn: 1938-6737, Copyright policy )
Authors: John S. Starzynski;

doi: 10.1149/1.2355728 , 10.1149/ma2006-02/22/1097

Development of a Selective Tantalum Carbide Etchant

Abstract

A superior nonflammable selective TaC etchant has been developed. This etchant possesses a TaC etch rate of 13 Aå/minute as well as TaC to HfO2 etch selectivity of 140:1. The TaC to SiO2 etch selectivity is high enough to allow the use of this etchant with a SiO2 hard mask.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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