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https://doi.org/10.1...arrow_drop_down

https://doi.org/10.1142/978981...

Article . 2005 . Peer-reviewed

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NANOLITHOGRAPHY WITH FULLERITE AS A RESIST

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 01 Apr 2005Publisher:World Scientific Pub Co Pte LtdJournal:Physics, Chemistry and Application of Nanostructures

Authors: Nizhny Novgorod; S. N. Vdovichev; S. A. Gusev; L. A. Mazo;

doi: 10.1142/9789812701947_0107

NANOLITHOGRAPHY WITH FULLERITE AS A RESIST

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Abstract

Electron-beam nanolithography with fullerite films was developed using different substrates. Fabrication of the ordered patterns with feature size in the range of tens of nanometres was demonstrated.

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