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Bioinspired flow-sensing capacitive microphone

Authors: Johar Pourghader; Weili Cui; Mahdi Farahikia; Junpeng Lai; Morteza Karimi; Changhong Ke; Ronald Miles;

Bioinspired flow-sensing capacitive microphone

Abstract

Inspired by the auditory systems of small animals, such as spiders, the tachinid fly, Ormia ochracea, and mosquitoes, a novel low-noise, flow-sensing capacitive MEMS microphone capable of sensing acoustic particle velocity is introduced. Unlike conventional microphones that have a diaphragm for sensing sound pressure, this design consists of a thin, porous, movable structure that is intended to be driven by viscous forces as a result of the sound-induced flow. This viscous force then rotates the movable structure around a middle central hinge and creates a change in capacitance caused by a relative motion between neighboring beams. The whole structure is made of one layer of silicon using a silicon-on-insulator (SOI) wafer using photolithography technology with a device layer thickness of 5 μm. The movable part has dimensions of 0.7 mm × 1.2 mm and is placed above a cavity inside the bulk silicon that facilitates the flow of sound particles. This microphone responds to flow (a vector) rather than pressure (a scalar). Ultimately, experimental results demonstrate a sensitivity of approximately 5 mV/Pa, a noise floor between 10−4 and 10−5 Pa/Hz, and directivity ratios reaching up to 77 at 2000 Hz, underscoring its potential for high-performance acoustic applications.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
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