
doi: 10.1121/1.406892
A viscously coupled dual beam accelerometer. An accelerometer (60) includes a first proof mass (32') and a second proof mass (42'), which are respectively connected by flexures (36' and 46') to a first base (34') and a second base (44'). The first and second bases are clamped between a top enclosure (62) and a bottom enclosure (64), between which is defined a cavity (66) in which the first and second proof masses are disposed. A quartz crystal resonator (38') extends between the first proof mass and the first base; similarly, a quartz crystal resonator (48') extends between the second proof mass and second base. The quartz crystal resonators experience tension/compression in a push-pull mode when the accelerometer is subjected to acceleration along an acceleration-sensitive axis (26') that extends transversely through the proof masses. A fluid within the cavity couples the first and second proof masses together through a "squeeze film damping," due to their closely-spaced relationship to each other. As a result of this dynamic mutual damping of out-of-phase motion of the first and second proof masses, tracking errors in the signals produced by the quartz crystal resonators are minimized when the accelerometer is subjected to vibration at a frequency close to the resonant frequency of the proof masses.
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