Stress sensitive element

Jun Watanabe

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The Journal of the Acoustical Society of America

Article . 2009 . Peer-reviewed

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https://dx.doi.org/10.1121/1.3...

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Stress sensitive element

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2009 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 126, page 2,834 (issn: 0001-4966,

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Authors: Jun Watanabe;

doi: 10.1121/1.3262554

Stress sensitive element

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Abstract

A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.

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