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Film bulk acoustic resonator and filter circuit including a plurality of film bulk acoustic resonators

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2007 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 122, page 3,146 (issn: 0001-4966, Copyright policy )
Authors: Yasuo Ebuchi;

doi: 10.1121/1.2822935

Film bulk acoustic resonator and filter circuit including a plurality of film bulk acoustic resonators

Abstract

A film bulk acoustic resonator includes a first electrode, a piezoelectric film disposed on the first electrode, a second electrode disposed on the piezoelectric film or disposed above the piezoelectric film, and an additional film disposed on and abutting the piezoelectric film. The additional film has at least one pair of opposite sides which are non-parallel with each other. The additional film includes a plurality of stripe-shaped openings.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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