Purpose:A project to construct a new treatment facility, as an extension of the existing HIMAC facility, has been initiated for the further development of carbon‐ion therapy at NIRS. This new treatment facility is equipped with a 3D irradiation system with pencil‐beam scanning. The challenge of this project is to realize treatment of a moving target by scanning irradiation. To achieve fast rescanning within an acceptable irradiation time, the authors developed a fast scanning system.Methods:In order to verify the validity of the design and to demonstrate the performance of the fast scanning prior to use in the new treatment facility, a new scanning‐irradiation system was developed and installed into the existing HIMAC physics‐experiment course. The authors made strong efforts to develop (1) the fast scanning magnet and its power supply, (2) the high‐speed control system, and (3) the beam monitoring. The performance of the system including 3D dose conformation was tested by using the carbon beam from the HIMAC accelerator.Results:The performance of the fast scanning system was verified by beam tests. Precision of the scanned beam position was less than ±0.5 mm. By cooperating with the planning software, the authors verified the homogeneity of the delivered field within ±3% for the 3D delivery. This system took only 20 s to deliver the physical dose of 1 Gy to a spherical target having a diameter of 60 mm with eight rescans. In this test, the average of the spot‐staying time was considerably reduced to, while the minimum staying time was .Conclusions:As a result of this study, the authors verified that the new scanning delivery system can produce an accurate 3D dose distribution for the target volume in combination with the planning software.