Nanostructures of the tin oxide, indium oxide and tin-doped indium oxide have been fabricated on silicon by chemical vapor deposition from a mixture of metal oxide nanoparticles and single-wall carbon nanotubes (SWCNT). Different ratios of the metal oxide to SWCNT have been used. It was found that the morphology of the nanostructures depends on the substrate temperature. The morphology, growth direction and optical properties have been studied by scanning electron microscopy, transmission electron microscopy and photoluminescence spectroscopy.