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Part of book or chapter of book . 2007
Full-Text: https://doi.org/10.1109/LEOSST.2007.4288368
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Soft lithographic fabrication of microresonators

descriptionPublicationkeyboard_double_arrow_right Article , Part of book or chapter of book 01 Jul 2007 United States Publisher:SPIEJournal:SPIE Proceedings, volume 6,717, page 671,706 (issn: 0277-786X, Copyright policy )
Authors: Armani, A. M.; Vahala, K. J.;

doi: 10.1117/12.754326 , 10.1109/leosst.2007.4288368

Soft lithographic fabrication of microresonators

Abstract

Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 106 . This technique produces resonators with material-limited quality factors.

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United States
Related Organizations
Keywords

toroid microcavity masters, polymer microcavity arrays, micromechanical resonators, Q-factor, soft lithography, 540, microcavities, microresonators, 620

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    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Green