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doi: 10.1117/12.721252
Nano-patterning of metals on gold film and silicon nitride membrane using Dip Pen Nanolithography (DPN TM ) is reported in this study. Using this technique, nano-particles can be delivered or nano-scale features of metals can be deposited precisely at specific locations using the unique registration capabilities of DPN. Monolayers of metal salts (FeCl 2 , FeCl 3 , PdCl 2 , etc.) are deposited with nano-scale precision using DPN. These metal salts can be subsequerntly reduced to pure metals in a reducing environment for various applications (e.g., magnetic memory storage, nano-catalysis, molecular electronics, brand protection, nano-sensors, etc.). Square nano-patterns of Palladium and Iron salts were successfully deposited using this technique with thickness of the deposited materials being less than 1 nm.
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