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https://doi.org/10.1117/12.658...
Article . 2006 . Peer-reviewed
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Nonlinear optimal tracking control of a piezoelectric nanopositioning stage

Authors: William S. Oates; Ralph C. Smith;

Nonlinear optimal tracking control of a piezoelectric nanopositioning stage

Abstract

High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relatively low frequency and low field levels. However, in applications where the stage operates over a relatively large region (microns to millimeters) and broad frequency range (Hz - kHz), piezoelectric materials often exhibit nonlinear and rate-dependent hystereis which requires control designs that can effectively accommodate such behavior. In this paper, a nonlinear, thermal-relaxation, piezoelectric constitutive law is incorporated into an open loop optimal tracking control design to accurately track a desired reference signal when nonlinearities, thermal relaxation and hyteresis are present. A comparison between linear optimal control and the nonlinear optimal control design is given to illustrate performance enhancements when the constitutive behavior is included in the control design.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Average
Average
Average