The positional precision of laser scribing and laser marking in precision metrological tools, such as scale plate and scale dial, is of the order of µm. The control of scribing must be very accurate. The laser beam parameters, focal length of the lens, and the position of the focal spot must be carefully selected and accurately controlled. The workpiece must also be accurately and repeatedly positioned. Any deviation from the required parameters would seriously affect the product quality. This paper studied an Nd:YAG laser scribing system specially designed for scribing of extremely high precision dial scale used in petroleum drilling machine. The relevant parameters were carefully selected and optimized. CAD, CAM, NC and automatic control technology were employed in the system. The integration of optics, mechanics, electronics and computer ensured high precision laser scribing.