
doi: 10.1117/12.540342
This paper outlines the testing of a piezoelectric ultrasonic motor (PUSM). The authors propose the use of a pseudoelastic NiTi thin film layer to replace the traditional fiber reinforced polymer contact layer. In accordance with this goal, a literature review of reported accomplishments in the area of the tribology of NiTi, both shape memory and pseudoelastic, is provided. The results of the baseline testing of the commercially acquired PUSMs are presented. The motors were baseline tested using a dead-weight force system, then disassembled and a 10 μm thick layer of NiTi was deposited on the rotor using a dc magnetron sputtering process. The motors were then reassembled and tested again. A comparison of the initial results is presented and discussed.
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