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Capacitive pressure sensor for MEMS

Authors: Amita Gupta; Amir Ahmad; Ranvir Singh;

Capacitive pressure sensor for MEMS

Abstract

Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite sofware.

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    popularity
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    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
12
Top 10%
Top 10%
Average
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