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Multichannel 3D profilometry

Authors: Chongxiang Li; Anand K. Asundi; Zhong P. Fang;

Multichannel 3D profilometry

Abstract

With the increasing demand for micro-products and bioengineering research, resolutions of profiles with micrometer or even nanometer scale are becoming commonplace. In addition development of large integrated manufacturing systems and the real time life science growth and adaptation need high-speed display and real-time inspection. Single point measurement is time consuming method with large area profile and micrometer resolution. Thus there is a need for a fast 3-D measurement system with high resolution. This paper presents a short overview among optical 3-D shape measurement techniques, and concentrates on the confocal method. Based on the properties analysis, a novel multi-channel 3-D topography measurement system was proposed. The feasibility and the construction of system were described A unique new structure of fiber coupled confocal system is put forth to solve present problems confronted in confocal system. This system can meet the current demand of high resolution and fast 3-D measurement.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
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