Abstract Thermal effects are well known to influence the electronic and optical properties of materials through several physical mechanisms and are the basis for various optoelectronic devices. The thermo-optic (TO) effect, the refractive index variation with temperature (dn/dT), is one of the most common mechanisms used for tunable optical devices, including integrated optical components, metasurfaces, and nano-antennas. However, when a static and fixed operation is required, i.e., temperature invariant performance – this effect becomes a drawback and may lead to undesirable behavior through drifting of the resonance frequency, amplitude, or phase, as the operating temperature varies over time. In this work, we present a systematic approach to mitigate thermally induced optical fluctuations in nanophotonic devices. By using hybrid subwavelength resonators composed from two materials with opposite TO dispersions (dn/dT < 0 and dn/dT > 0), we are able to compensate for TO shifts and engineer nanophotonic components with zero effective TO coefficient (dn eff/dT ≈ 0). We demonstrate temperature invariant resonant frequency, amplitude, and phase response in meta-atoms and metasurfaces operating across a wide temperature range and broad spectral band. Our results highlight a path towards temperature invariant nanophotonics, which can provide constant and stable optical response across a wide range of temperatures and be applied to a plethora of optoelectronic devices. Controlling the sign and magnitude of TO dispersion extends the capabilities of light manipulation and adds another layer to the toolbox of optical engineering in nanophotonic systems.