Integrated hybrid MEMS require new micromanipulation devices in assembly processes. Although absolute forces are restricted optical tweezers are promising tools with unique advantages. Recent developments in beam shaping allow the control of a large number of different particles. Optical manipulation can also be used to assemble tiny structures by a generative process. Any type of particle, primarily coated with high-affinity biomolecules, can be applied as building blocks to form complex structures. By moving the particle into the requested orientation by holographic optical tweezers complex parts become possible. Also, shape-complimentary preforms can be fabricated with 2-photon-polymerization (2PP) and utilized to assemble the desired structure. Finally, microvalves and motors in lab-on-a-chip systems can be optically fabricated and also driven by optical forces.