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Optical Engineering
Article . 2003 . Peer-reviewed
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Spatial coherence radar applied for tilted surface profilometry

Authors: Zhihui Duan;

Spatial coherence radar applied for tilted surface profilometry

Abstract

A new method of spatial coherence profilometry is demon- strated. The surface profile is measured by shifting the spatial degree of coherence gradually in its own space of existence, and modulating its phase angle. In each point of the sample we analyze the change of light intensity versus the phase of a Fresnel zone pattern used as the intensity distribution of an incoherent quasimonochromatic source. The tilt of the surface is measured by gradually shifting the Fresnel zone plate on its transverse plane. This shift of the light source rotates the spatial degree of coherence around the coordinate origin until the condition of maximum interference visibility is fulfilled. The method works without any mechani- cal movement and a quasimonochromatic light illuminates the interfero- metric system. Experimental demonstration of the new method is pre- sented. © 2003 Society of Photo-Optical Instrumentation Engineers.

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    popularity
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
13
Average
Top 10%
Top 10%
bronze