Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Article . 2021 . Peer-reviewed

License: https://publishing.aip.org/authors/rights-and-permissions

Data sources: Crossref

https://avs.scitation.org/doi/...

Article

Data sources: Microsoft Academic Graph

Select content type to embed

All Research products

arrow_drop_down

<script type="text/javascript">
<!--
document.write('<div id="oa_widget"></div>');
document.write('<script type="text/javascript" src="https://www.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=undefined&type=result"></script>');
-->
</script>

COPY SCRIPT

For further information contact us at helpdesk@openaire.eu

Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system

descriptionPublicationkeyboard_double_arrow_right Article 25 Jun 2021Publisher:American Vacuum SocietyJournal:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, volume 39 (issn: 2166-2746, eissn: 2166-2754,

Authors: Afshin Alipour; S. O. Reza Moheimani; James H. G. Owen; Ehud Fuchs; John N. Randall;

doi: 10.1116/6.0001107

Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system

- Summary
- Metrics

Abstract

In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2×1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy.

Related Organizations

The University of Texas at Dallas
United States

Impact byBIP!

	citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	5
	popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.	Top 10%
	influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	Average
	impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.	Average

Found an issue? Give us feedback

Top 10%

Average

Fields of Science (3) View all

engineering and technology

industrial biotechnology

Fields of Science

engineering and technology

industrial biotechnology

View all

Upload OA version

Are you the author? Do you have the OA version of this publication?

uploadUpload now!