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Lithographic band gap tuning in photonic band gap crystals

Authors: Cheng, C. C.; Scherer, A.; Arbet-Engels, V.; Yablonovitch, E.;

Lithographic band gap tuning in photonic band gap crystals

Abstract

We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry etching, we have shifted the conduction band of crystals within the near-infrared. Such microfabrication has enabled us to reproducibly define photonic crystals with lattice parameters ranging from 650 to 730 nm. In GaAs semiconductor wafers, these can serve as high-reflectivity (>95%) mirrors. Here, we show the procedure used to generate these photonic crystals and describe the geometry dependence of their spectral response.

Country
United States
Keywords

GALLIUM ARSENIDES, NEAR INFRARED RADIATION, SPECTRAL RESPONSE, MIRRORS, OPTOELECTRONIC DEVICES, OPTICAL MATERIALS, LITHOGRAPHY, ETCHING, 540, 530, ELECTRON BEAMS, CRYSTAL STRUCTURE, ION BEAMS, LATTICE PARAMETERS, BAND STRUCTURE, REFLECTIVITY

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    influence
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
44
Average
Top 1%
Top 10%
Green