
doi: 10.1116/1.588601
We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry etching, we have shifted the conduction band of crystals within the near-infrared. Such microfabrication has enabled us to reproducibly define photonic crystals with lattice parameters ranging from 650 to 730 nm. In GaAs semiconductor wafers, these can serve as high-reflectivity (>95%) mirrors. Here, we show the procedure used to generate these photonic crystals and describe the geometry dependence of their spectral response.
GALLIUM ARSENIDES, NEAR INFRARED RADIATION, SPECTRAL RESPONSE, MIRRORS, OPTOELECTRONIC DEVICES, OPTICAL MATERIALS, LITHOGRAPHY, ETCHING, 540, 530, ELECTRON BEAMS, CRYSTAL STRUCTURE, ION BEAMS, LATTICE PARAMETERS, BAND STRUCTURE, REFLECTIVITY
GALLIUM ARSENIDES, NEAR INFRARED RADIATION, SPECTRAL RESPONSE, MIRRORS, OPTOELECTRONIC DEVICES, OPTICAL MATERIALS, LITHOGRAPHY, ETCHING, 540, 530, ELECTRON BEAMS, CRYSTAL STRUCTURE, ION BEAMS, LATTICE PARAMETERS, BAND STRUCTURE, REFLECTIVITY
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