Surface differential reflectivity spectroscopy of semiconductor surfaces

descriptionPublicationkeyboard_double_arrow_right Article 01 May 1987 Italy English Publisher:American Vacuum SocietyJournal:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, volume 5, pages 327-332 (issn: 0734-2101, eissn: 1520-8559,

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Authors: Selci S; Ciccacci F; Chiarotti G; Chiaradia P; Cricenti; A;

doi: 10.1116/1.574154

handle: 20.500.14243/209104 , 11311/660120

Surface differential reflectivity spectroscopy of semiconductor surfaces

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Abstract

An overview of the method of surface differential reflectivity (SDR) for the study of semiconductor surfaces is presented. This includes the principles of the technique, the experimental apparatus, and some theoretical considerations concerning the connection of SDR data with the microscopic properties of the surface. Experimental results are also presented as an example of the application of this spectroscopy to the study of semiconductor surfaces.

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Italy

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Keywords

semiconductor surfaces. optical properties, 0765Eh 6835-p 7820Ci OPERATION REFLECTION SPECTROSCOPY REFLECTIVITY REFLECTIVITY METHOD REVIEWS SEMICONDUCTOR MATERIALS SURFACE ANALYSIS USES

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