Method to control specimen charging for SIMS and AES of insulators

Art Nelson; A. K. Green

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Journal of Vacuum Sc...arrow_drop_down

Journal of Vacuum Science and Technology

Article . 1980 . Peer-reviewed

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https://dx.doi.org/10.1116/1.5...

Article

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Method to control specimen charging for SIMS and AES of insulators

descriptionPublicationkeyboard_double_arrow_right Article 01 Jul 1980 English Publisher:American Vacuum SocietyJournal:Journal of Vacuum Science and Technology, volume 17, pages 855-855 (issn: 0022-5355,

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Authors: Art Nelson; A. K. Green;

doi: 10.1116/1.570577

Method to control specimen charging for SIMS and AES of insulators

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Abstract

A method for controlling specimen charging in SIMS and AES of insulators, utilizing an extension of the metal diaphragm technique, is reported. (AIP)

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