
doi: 10.1116/1.3662405
High-aspect-ratio nanostructures were replicated by injection compression molding. The effects of the mold temperature and pattern shape on the degree of replication were investigated using a replication technique for optical disks (digital versatile disks) and a Ni stamper with patterns with a width and height of 200 and 400 nm. A higher mold temperature and a smaller area-duty ratio (hill area/unit area) of the Ni stamper, i.e., a larger area-duty ratio of the replica resulted in better replication because a Ni stamper with a smaller area-duty ratio suppresses the formation of a skin layer.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 13 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Top 10% | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 10% | |
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