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pMUT for high intensity focused ultrasound

Authors: null An Nguyen-Dinh; null Dag Wang; Cyril Meynier; Frode Tyholdt; Andreas Vogl; Hannah Tofteberg; Niels Peter Ostbo; +1 Authors

pMUT for high intensity focused ultrasound

Abstract

Capacitive ultrasonic tranducers, cMUTs rely on the electrostatic field between the membrane and a back plate for sensing andactuation. This is an excellent solution for small amplitudes. But the movement of the membrane is physically limited by the bottom plate (risk of collapse). Furthermore, pull-in and linearity considerations restrict the available range to about one percent of thegap. Piezoelectric micromachined ultrasonic transducers, pMUTs, on the other hand have no such restrictions. The excitation is basedon lateral contraction of a thin film of Lead Zirconate Titanate, PZT, deposited on top of the membrane. Then there is no need for abackplate, and the linear range is greatly increased. Therefore, pMUTs are ideally suited for applications demanding large excitationamplitude, such as high intensity focused ultrasound, HIFU. In this work, we present pMUTs designed for HIFU operation around 1MHz.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
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