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https://doi.org/10.1109/ultsym...
Article . 2012 . Peer-reviewed
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Modelling of CMUTs with anisotropic plates

Authors: la Cour, Mette Funding; Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; id_orcid 0000-0002-7896-3136; Thomsen, Erik Vilain; id_orcid 0000-0002-2772-926X;

Modelling of CMUTs with anisotropic plates

Abstract

Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic calculations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.

Country
Denmark
Keywords

Resonant frequency, Silicon, Mathematical model, Equations, Integrated circuit modeling, Finite element analysis, Analytical models

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Average
Average
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