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Aperta - TÜBİTAK Açık Arşivi
Other literature type . 2011
License: CC BY
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IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Article . 2011 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
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Deep-collapse operation of capacitive micromachined ultrasonic transducers

Authors: Olcum, S.; Yamaner F.Y.; Bozkurt, A.; Atalar, A.;

Deep-collapse operation of capacitive micromachined ultrasonic transducers

Abstract

Capacitive micromachined ultrasonic transducers (CMUTs) have been introduced as a promising technology for ultrasound imaging and therapeutic ultrasound applications which require high transmitted pressures for increased penetration, high signal-to-noise ratio, and fast heating. However, output power limitation of CMUTs compared with piezoelectrics has been a major drawback. In this work, we show that the output pressure of CMUTs can be significantly increased by deep-collapse operation, which utilizes an electrical pulse excitation much higher than the collapse voltage. We extend the analyses made for CMUTs working in the conventional (uncollapsed) region to the collapsed region and experimentally verify the findings. The static deflection profile of a collapsed membrane is calculated by an analytical approach within 0.6% error when compared with static, electromechanical finite element method (FEM) simulations. The electrical and mechanical restoring forces acting on a collapsed membrane are calculated. It is demonstrated that the stored mechanical energy and the electrical energy increase nonlinearly with increasing pulse amplitude if the membrane has a full-coverage top electrode. Utilizing higher restoring and electrical forces in the deep-collapsed region, we measure 3.5 MPa peak-to-peak pressure centered at 6.8 MHz with a 106% fractional bandwidth at the surface of the transducer with a collapse voltage of 35 V, when the pulse amplitude is 160 V. The experimental results are verified using transient FEM simulations.

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Turkey
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Keywords

Finite element method simulation, Ultrasonic Therapy, Electrical energy, Ultrasonic transducers, equipment design, Circuit, Output power, Ultrasonics, High signal-to-noise ratio, Pulse amplitude, Ultrasonography, instrumentation, Signal to noise ratio, Ultrasonic imaging, computer aided design, Static deflections, article, Impedance, Mechanical energies, Equipment Design, Fading (radio), Ultrasonic therapy, transducer, Membranes;,optimization, Computer-Aided Design, ultrasound therapy, electric capacitance, Transmit, equipment, Restoring forces, Finite element method, FEM simulations, Transducers, Electrical force, Electric Capacitance, Therapeutic ultrasound, Fabrication, TK1-4661 Electrical engineering. Electronics Nuclear engineering, Electrical pulse excitation, Bandwidth, Pulse amplitude modulation, Piezoelectrics, Cmut Arrays, Fractional bandwidths, Collapse voltage, Capacitive micromachined ultrasonic transducer, echography, 621, 620, Equipment Failure Analysis, Fading, Analytical approach, Power quality, Ultrasound imaging

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
37
Top 10%
Top 10%
Top 10%
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