
pmid: 21859571
High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect.
Oxygen, Hot Temperature, Silicates, Electric Conductivity, Acoustics, Zinc Oxide, Sensitivity and Specificity
Oxygen, Hot Temperature, Silicates, Electric Conductivity, Acoustics, Zinc Oxide, Sensitivity and Specificity
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