
pmid: 17091855
We propose a dual-plate pressure sensor operating with pressure-induced frequency shifts of thickness-shear modes of a crystal plate resonator. Under an applied normal pressure. The dual-plate structure causes flexure in the crystal plate rather than circumferential compression in usual thickness-shear pressure sensors. This suggests higher sensitivity because a plate responds to a normal pressure more than to a circumferential compression, which is shown by a theoretical analysis using the theory for small fields superposed on initial fields.
Equipment Failure Analysis, Manometry, Transducers, Pressure, Reproducibility of Results, Acoustics, Equipment Design, Stress, Mechanical, Shear Strength, Sensitivity and Specificity
Equipment Failure Analysis, Manometry, Transducers, Pressure, Reproducibility of Results, Acoustics, Equipment Design, Stress, Mechanical, Shear Strength, Sensitivity and Specificity
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