
This paper reports the design and testing of forward-viewing annular arrays fabricated using capacitive micromachined ultrasonic transducer (CMUT) technology. Recent research studies have shown that CMUTs have broad frequency bandwidth and high-transduction efficiency. One- and two-dimensional CMUT arrays of various sizes already have been fabricated, and their viability for medical imaging applications has been demonstrated. We fabricated 64-element, forward-viewing annular arrays using the standard CMUT fabrication process and carried out experiments to measure the operating frequency, bandwidth, and transmit/receive efficiency of the array elements. The annular array elements, designed for imaging applications in the 20 MHz range, had a resonance frequency of 13.5 MHz in air. The immersion pulse-echo data collected from a plane reflector showed that the devices operate in the 5-26 MHz range with a fractional bandwidth of 135%. The output pressure at the surface of the transducer was measured to be 24 kPa/V. These values translate into a dynamic range of 131.5 dB for 1-V excitation in 1-Hz bandwidth with a commercial low noise receiving circuitry. The designed, forward-viewing annular CMUT array is suitable for mounting on the front surface of a cylindrical catheter probe and can provide Doppler information for measurement of blood flow and guiding information for navigation through blood vessels in intravascular ultrasound imaging.
Reproducibility of results, Transducers, Ultrasonic transducers, Capacitance transducers, Capacitance, Equipment, Electric Capacitance, Resonance, Sensitivity and Specificity, Article, Immersion transducers, Spurious signal noise, Bandwidth, Equipment failure analysis, Frequencies, Output pressure, Pulse echo, Electric capacitance, Evaluation, Arrays, Instrumentation, Ultrasonography, Miniaturization, Methodology, Reproducibility of Results, Equipment Design, Doppler effect, Reproducibility, Product design, Micromachining, Equipment Failure Analysis, Sensitivity and specificity, Equipment design, Annular arrays, Echography, Medical imaging, Electronics, Micromachined ultrasonic transducers
Reproducibility of results, Transducers, Ultrasonic transducers, Capacitance transducers, Capacitance, Equipment, Electric Capacitance, Resonance, Sensitivity and Specificity, Article, Immersion transducers, Spurious signal noise, Bandwidth, Equipment failure analysis, Frequencies, Output pressure, Pulse echo, Electric capacitance, Evaluation, Arrays, Instrumentation, Ultrasonography, Miniaturization, Methodology, Reproducibility of Results, Equipment Design, Doppler effect, Reproducibility, Product design, Micromachining, Equipment Failure Analysis, Sensitivity and specificity, Equipment design, Annular arrays, Echography, Medical imaging, Electronics, Micromachined ultrasonic transducers
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