
Flexure-based micropositioning systems with a large workspace are attractive for a variety of precision engineering applications. In this paper, a new idea of multistage compound parallelogram flexure is proposed for the mechanism design of a novel parallel-kinematic XY micropositioning system, which has a motion range larger than 10 mm along with a compact structure. The established quantitative models and the stage performances are validated by conducting finite-element analysis (FEA) and experimental studies. Moreover, an enhanced model-predictive control (EMPC) is presented for positioning control of the system, which has a nonminimum-phase plant. It is shown that the EMPC is capable of producing a low magnitude of output tracking error by imposing an appropriate suppression on the control effort. Simulation and experimental studies reveal that the EMPC scheme outperforms the conventional proportional-integral-derivative (PID) and MPC methods in terms of transient response speed and steady-state accuracy. The idea that is presented in this paper is extendable to design and control of other micro-/nanopositioning systems with either minimum- or nonminimum-phase plants.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 176 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Top 1% | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 1% | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 1% |
