Co-ferrite with spinel structure is one of the attractive materials for spintronics and artificial multi-ferroics. Due to the insulating and high-curie temperature properties, Co-ferrite thins films have potential applications in such so called spin filters, where a combination of insulating ferrite with a non-magnetic electrode is believed capable of creating pure spin polarized currents [1]. Co-ferrite also shows large magnetostrictive effect. Which can be used for enhancing magnetoelectric coupling between ferroelectric phase and magnetic phase of multiferroic nanostructures [2]. Films with (001) orientation and perpendicular magnetic anisotropy are essential to realize the interesting properties of Co-ferrite thin films. So far, Single crystal substrate such as SrTiO 3 , MgO have been reported for the heteroepitaxial growth of (001) orientated Co ferrite films. However, from the practical application point of view, it is strongly recommended to prepare orientated Co ferrite films onto thermally oxidized silicon wafers (SiO 2 /Si).