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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao IRIS - Università de...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
IEEE Transactions on Instrumentation and Measurement
Article . 2016 . Peer-reviewed
License: IEEE Copyright
Data sources: Crossref
DBLP
Article . 2021
Data sources: DBLP
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Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials

Authors: TRIGONA, CARLO; ANDO', Bruno; BAGLIO, Salvatore;

Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials

Abstract

This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an optical output and operates in a resonant condition. A custom fabrication technology, based on a silicon-on-insulator substrate, has been considered for the development of the inertial sensor. The optical readout has been accomplished using a metal–dielectric multilayer photonic bandgap (PBG) material. Such an optical structure, composed of alternated layers of one metal and one dielectric material, is embedded in the micromachined device, thus obtaining reflection properties correlated with the displacement of the proof mass induced by the external angular velocity. The principle of the micromachined gyroscope is first introduced, and then, the microelectromechanical gyroscope structure, the materials properties, and the fabrication technology are illustrated. Numerical analyses have also been performed in order to gain insight into the micromachined device. Furthermore, the optical transduction principle that exploits metal–dielectric 1-D PBG structures has been investigated from both a theoretical and an experimental point of view.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
12
Top 10%
Top 10%
Average
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