MEMS-Based AC Voltage Reference

descriptionPublicationkeyboard_double_arrow_right Article 01 Apr 2005 Finland English Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:IEEE Transactions on Instrumentation and Measurement, volume 54, pages 595-599 (issn: 0018-9456,

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Authors: Pesonen, Nadine; Suhonen, Mika; Oja, Aarne S.; Manninen, Antti; Tisnek, Nikolai; Seppä; Heikki; +1 Authors

doi: 10.1109/tim.2004.843422

MEMS-Based AC Voltage Reference

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Abstract

An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few µV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz.

Country

Finland

Related Organizations

VTT Technical Research Centre of Finland
Finland
Centre for Metrology and Accreditation
Finland

Keywords

silicon-on-insulator, SOI, AC voltage reference, MEMS, capacitive sensors, microelectromechanical systems, micromachining

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