Built-in self test of CMOS-MEMS accelerometers

descriptionPublicationkeyboard_double_arrow_right Article , Conference object 25 Jun 2003Publisher:IEEEJournal:Proceedings. International Test Conference

Authors: Nilmoni Deb; R. D. (Shawn) Blanton;

doi: 10.1109/test.2002.1041864

Built-in self test of CMOS-MEMS accelerometers

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Abstract

A built-in self-test technique for MEMS that is applicable to symmetrical microstructures is described. A combination of existing layout features and additional circuitry is used to make measurements from symmetrically-located points. In addition to the normal sense output, self-test outputs are used to detect the presence of layout asymmetry that are caused by local, hard-to-detect defects. Simulation results for an accelerometer reveal that our self-test approach is able to distinguish misbehavior resulting from local defects and manufacturing process variations.

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Carnegie Mellon University
United States

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