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IEEE Transactions on Electron Devices
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IEEE Transactions on Electron Devices
Article . 2018 . Peer-reviewed
License: IEEE Copyright
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Development of GaN Vertical Trench-MOSFET With MBE Regrown Channel

Authors: Wenshen Li; Huili Grace Xing; Kazuki Nomoto; Kevin Lee; S.M. Islam; Zongyang Hu; Mingda Zhu; +3 Authors

Development of GaN Vertical Trench-MOSFET With MBE Regrown Channel

Abstract

GaN vertical trench-MOSFETs incorporating molecular beam epitaxy (MBE) regrown channel are developed and investigated. The channel regrowth by MBE prevents repassivation of the p-type GaN body while promising higher channel mobility. Two different designs of the lateral portion of the regrown channel are compared: without or with an n+-GaN buried layer. Without an n+ buried layer, a respectable 600-V breakdown voltage (BV) is measured in the absence of edge termination, indicating a decent critical field strength (>1.6 MV/cm) of the regrown channel. However, the ON-resistance is limited by the highly resistive lateral channel due to Mg incorporation. With an n+ buried layer, the limitation is removed. Excellent ON-current of 130 mA/mm and ON-resistivity of $6.4 ~\rm {m\Omega \cdot cm^{2}}$ are demonstrated. The BV is limited by high source–drain leakage current from the channel due to drain-induced barrier lowering (DIBL) effect. Device analysis together with TCAD simulations points out the major cause for the DIBL effect: the presence of interface charge beyond a critical value ( $\sim 6\times 10^{12}\,\,\rm {cm^{-2}}$ ) at the regrowth interface on etched sidewalls. This paper provides valuable insights into the design of GaN vertical trench-MOSFET with a regrown channel, where simultaneous achievement of low ON-resistivity and high BV is expected in devices with reduced interface charge density and improved channel design to eliminate DIBL.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
50
Top 10%
Top 10%
Top 10%
hybrid