ESD protection in finfet technologies
Steven Thijs;
ESD protection in finfet technologies
▸ Strong dependency on - process technology (SOIFF, bulkFF) - process options (strain, SEG,…) - layout parameters (L G , W fin ,…) ▸ ESD needs to be considered early during technology development ▸ ESD remains very challenging but ▸ ESD is no roadblock for the introduction of both SOIFF and bulkFF!
- IMEC Netherlands
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selected citations
Citations provided by BIP!
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
Citations provided by BIP!popularityPopularity provided by BIP!
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
Popularity provided by BIP! 0
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