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Article . 2003 . Peer-reviewed

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Overview of nanolithography in Europe

Name: Overview of nanolithography in Europe
Creator: J.-C. Guibert

descriptionPublicationkeyboard_double_arrow_right Article 26 Jun 2003Publisher:IEEEJournal:Proceedings. International Semiconductor Conference

Authors: J.-C. Guibert;

doi: 10.1109/smicnd.2002.1105810

Overview of nanolithography in Europe

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Abstract

Summary form only given. Lithography is still the enabler technology, allowing movement along the roadmap, and new developments in this field are often led by European teams, whether academic or industrial ones. This paper looks in depth into nanolithography activities in Europe, which in fact cover a broad spectrum of technologies, from electron-beam to extreme UV, including nanoimprint, ion-beam and more innovative concepts.

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