
This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.
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