MEMS Applications in Hard Disk Drives

Toshiki Hirano; Henry Yang

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https://doi.org/10.1...arrow_drop_down

https://doi.org/10.1109/sensor...

Article . 2007 . Peer-reviewed

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https://dx.doi.org/10.1109/sen...

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MEMS Applications in Hard Disk Drives

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 01 Jan 2007Publisher:IEEEJournal:TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Authors: Toshiki Hirano; Henry Yang;

doi: 10.1109/sensor.2007.4300605

MEMS Applications in Hard Disk Drives

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Abstract

As a new application of MEMS to hard disk drives, gimbal-chip (a MEMS chip that replaces suspension's gimbal function) was investigated. A micro-actuator for tracking servo was also integrated in the chip. Design, process, and performance of the chip are reported.

Related Organizations

Hitachi Global Storage Technologies (United States)
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Hitachi (Japan)
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Hitachi (United States)
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