The AFM tweezers: integration of a tweezers function with an AFM probe

descriptionPublicationkeyboard_double_arrow_right Article 24 Aug 2005Publisher:IEEEJournal:The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., volume 1, pages 621-624

Authors: T. Takekawa; K. Nakagawa; G. Hashiguchi;

doi: 10.1109/sensor.2005.1496494

The AFM tweezers: integration of a tweezers function with an AFM probe

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Abstract

A prototype of AFM (atomic force microscope) tweezers is presented. In order to combine the function of nano objects manipulation with AFM observation, we have developed a tweezers-type AFM probe device using micromachining technology. The device has two thin wedge-type arms shaped by anisotropic etching and local oxidation of silicon techniques; one arm plays the role of an AFM probe, and another plays that of a manipulation probe in cooperation with monolithically fabricated microactuators. We have successfully demonstrated the function of picking up nanoparticles by the developed AFM tweezers.

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Kagawa University
Japan

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