RF MEMS reliability

descriptionPublicationkeyboard_double_arrow_right Article 23 Apr 2004Publisher:IEEEJournal:TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), volume 2, pages 943-946

Authors: J. DeNatale; R. Mihailovich;

doi: 10.1109/sensor.2003.1216922

RF MEMS reliability

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Abstract

Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses. This paper presents a general discussion of the reliability limiting mechanisms that can impact RF MEMS devices, with an emphasis on the issues relevant to RF switch cycling lifetimes.

Related Organizations

Rockwell Automation (United States)
United States

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